What does the gas path control of the low-pressure plasma equipment cleaning machine include

• Categories:Technical Support
• Author:Plasma cleaning machine-CRF plasma plasma equipment-plasma surface treatment machine manufacturer-chengfeng intelligent manufacturing
• Origin:
• Time of issue:2021-11-12
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(Summary description)What does the gas path control of the low-pressure plasma equipment cleaning machine include: The low-pressure plasma equipment cleaning machine has requirements for the control of various functional gas circuits and the stability of the process gas, so what parts of the gas path control of the low-pressure plasma equipment cleaning machine are composed? The low-pressure plasma equipment cleaning machine is also called vacuum plasma surface treatment machine. The size and accuracy of the process gas flow rate controlled by the gas path has little effect on the plasma surface treatment effect. Therefore, the gas path of the low-pressure plasma equipment cleaning machine is controlled by the gas It is composed of pressure regulating and processing components, pressure reducing gauge with alarm output, vacuum solenoid valve, flow meter, etc. Let Chengfeng Zhizao give you a detailed introduction to help you increase your understanding. Air pressure adjustment processing device: The gas input from low-pressure equipment is generally process gas with relatively high cleanliness, so the basic structure of gas pressure regulating and processing components is mostly composed of pressure regulating valves and filters. Its main function is to control the air pressure within the required pressure range and filter the impurities that may be contained in the gas to ensure stable operation and keep the gas clean, such as a back-end flow meter. The gas pressure regulating and processing device commonly used in the existing plasma surface treatment machine can be divided into a combined type and an integrated type according to its structural characteristics. Secondary pressure gauge with alarm output: In order to monitor whether the air pressure of the equipment meets the working requirements in real time, a pressure gauge with alarm output function is set on the gas pressure regulating valve. When the pressure is too low, an alarm signal is output to ensure the normal operation of the equipment and the stability of the process gas. Vacuum solenoid valve: When the low-pressure plasma equipment cleaning machine is working, it needs to maintain the vacuum degree and the sealing of the vacuum chamber. Therefore, each gas path valve connected to the cavity must meet the requirements of vacuum sealing. We should choose the matching vacuum solenoid with gas path control. valve. In order to ensure stable operation of the low-pressure plasma surface treatment machine, vacuum solenoid valves are used to control one gas, and the vacuum solenoid valves selected are all two-position two-way. Flow meter: The air intake volume of the low-pressure plasma equipment cleaning machine is controlled by a flow meter. The principle is to control the air volume by adjusting the size of the vent valve. The equipment uses two flow scoring methods: air flotation flowmeter and mass flowmeter. If you want to learn more about the use of products or equipment in detail, please click on the online customer service of Chengfeng Zhizao, waiting for your call!