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What is the role of plasma equipment parameters Langmuir probe diagnosi
- Categories:Industry News
- Author:Plasma cleaning machine-CRF plasma plasma equipment-plasma surface treatment machine manufacturer-chengfeng intelligent manufacturing
- Origin:
- Time of issue:2021-09-30
- Views:
(Summary description)What is the role of plasma plasma equipment parameters Langmuir probe diagnosis: There are many factors that affect the processing effect of plasma plasma equipment. Plasma parameters are an important factor in the influencing factors. Therefore, it can be understood that the detection and diagnosis of plasma parameters of plasma plasma equipment is very important. There are many methods for measuring and diagnosing plasma parameters. The Langmuir probe method is a common diagnostic method that has been used so far. So what is this Langmuir probe method? The Langmuir probe method essentially uses an electrostatic probe to insert a metal probe into the plasma and apply a positive or negative bias to it to collect electrons or ion currents. Like other electrodes, a sheath is formed around the probe, and the area is usually small, so under appropriate conditions, the probe can only locally interfere with the plasma of the plasma plasma equipment. For the actual parameter diagnosis, the bias voltage of the Langmuir probe relative to the ground is VB, and the plasma potential is φp. When the detection voltage Vb=φp, the detection is at the same potential as the plasma. At this time, the current it collects from the mobile electrons mainly comes from the mobile electrons. With the increase of Vb and greater than φp, the current will saturate and reach the electronic saturation current value, but due to the increase of voltage, the current will also increase with the increase of the effective collection area of the probe, which is related to the geometry of the probe related. However, when the voltage of the probe changes, its effective collection area will also change, resulting in a change in the ion saturation current. Because the mass of ions is much greater than that of electrons, the saturation current of ions is much smaller than that of electrons. Chengfeng Zhizao has focused on the research and development of plasma plasma equipment for 20 years. If you want to know more product details or have questions about the use of the equipment, please click on the Chengfeng Zhizao online customer service, waiting for your call!
What is the role of plasma equipment parameters Langmuir probe diagnosi
(Summary description)What is the role of plasma plasma equipment parameters Langmuir probe diagnosis:
There are many factors that affect the processing effect of plasma plasma equipment. Plasma parameters are an important factor in the influencing factors. Therefore, it can be understood that the detection and diagnosis of plasma parameters of plasma plasma equipment is very important. There are many methods for measuring and diagnosing plasma parameters. The Langmuir probe method is a common diagnostic method that has been used so far. So what is this Langmuir probe method?
The Langmuir probe method essentially uses an electrostatic probe to insert a metal probe into the plasma and apply a positive or negative bias to it to collect electrons or ion currents. Like other electrodes, a sheath is formed around the probe, and the area is usually small, so under appropriate conditions, the probe can only locally interfere with the plasma of the plasma plasma equipment.
For the actual parameter diagnosis, the bias voltage of the Langmuir probe relative to the ground is VB, and the plasma potential is φp. When the detection voltage Vb=φp, the detection is at the same potential as the plasma. At this time, the current it collects from the mobile electrons mainly comes from the mobile electrons. With the increase of Vb and greater than φp, the current will saturate and reach the electronic saturation current value, but due to the increase of voltage, the current will also increase with the increase of the effective collection area of the probe, which is related to the geometry of the probe related. However, when the voltage of the probe changes, its effective collection area will also change, resulting in a change in the ion saturation current. Because the mass of ions is much greater than that of electrons, the saturation current of ions is much smaller than that of electrons.
Chengfeng Zhizao has focused on the research and development of plasma plasma equipment for 20 years. If you want to know more product details or have questions about the use of the equipment, please click on the Chengfeng Zhizao online customer service, waiting for your call!
- Categories:Industry News
- Author:Plasma cleaning machine-CRF plasma plasma equipment-plasma surface treatment machine manufacturer-chengfeng intelligent manufacturing
- Origin:
- Time of issue:2021-09-30 18:03
- Views:
Information
What is the role of plasma plasma equipment parameters Langmuir probe diagnosis:
There are many factors that affect the processing effect of plasma plasma equipment. Plasma parameters are an important factor in the influencing factors. Therefore, it can be understood that the detection and diagnosis of plasma parameters of plasma plasma equipment is very important. There are many methods for measuring and diagnosing plasma parameters. The Langmuir probe method is a common diagnostic method that has been used so far. So what is this Langmuir probe method?
The Langmuir probe method essentially uses an electrostatic probe to insert a metal probe into the plasma and apply a positive or negative bias to it to collect electrons or ion currents. Like other electrodes, a sheath is formed around the probe, and the area is usually small, so under appropriate conditions, the probe can only locally interfere with the plasma of the plasma plasma equipment.
For the actual parameter diagnosis, the bias voltage of the Langmuir probe relative to the ground is VB, and the plasma potential is φp. When the detection voltage Vb=φp, the detection is at the same potential as the plasma. At this time, the current it collects from the mobile electrons mainly comes from the mobile electrons. With the increase of Vb and greater than φp, the current will saturate and reach the electronic saturation current value, but due to the increase of voltage, the current will also increase with the increase of the effective collection area of the probe, which is related to the geometry of the probe related. However, when the voltage of the probe changes, its effective collection area will also change, resulting in a change in the ion saturation current. Because the mass of ions is much greater than that of electrons, the saturation current of ions is much smaller than that of electrons.
Chengfeng Zhizao has focused on the research and development of plasma plasma equipment for 20 years. If you want to know more product details or have questions about the use of the equipment, please click on the Chengfeng Zhizao online customer service, waiting for your call!
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