What are the characteristics of the glow discharge potential and light zone distribution of the plasma cleaner

• Categories:Technical Support
• Author:Plasma cleaning machine-CRF plasma plasma equipment-plasma surface treatment machine manufacturer-chengfeng intelligent manufacturing
• Origin:
• Time of issue:2021-07-04
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(Summary description)The previous article briefly introduced the glow discharge forms of vacuum and atmospheric plasma cleaners. The following mainly introduces the potential distribution and light area distribution of the plasma cleaners glow discharge. A distinctive feature of the glow discharge of the plasma cleaner is that the potential distribution in the gas is represented by the cathode drop. This is due to the effect of space charge, and the glow discharge has a large cathode drop. The surface of the cathode is covered with glow, and it is positively related to the discharge phenomenon. The current intensity is proportional to the current intensity in the tube. When the current changes, the current density and the cathode potential drop remain unchanged. At this time, it is a normal glow discharge. During the current rise process where the entire cathode is covered by glow, with the rise of current intensity and current density, the cathode drop begins to increase, and at this time it enters an abnormal glow discharge state. According to the spatial distribution of the plasma cleaning machine, it can be divided into two main areas: one is the cathode area of ​​the discharge, including the Aston dark zone, the cathode glow zone, the negative glow zone and the Faraday dark zone; It is the anode area, including the positive column area, the anode dark area and the anode glow area. The cathode part does not have plasma characteristics, and the discharge area from the positive column area to the anode is in a plasma state. The number density of positive ions is constant in the glow discharge cathode region of ordinary plasma cleaners. The increase in current density will cause the distortion of the electric field to further increase the cathode potential when entering the abnormal glow region, and the power loss in the cathode potential region will increase, which will lead to sputtering on the cathode. Cathode sputtering is a special process on the glow discharge cathode. It can remove the adhesion layer with different properties on the cathode surface and make the metal film adhere to the metal, glass, ceramic, mica and other materials.