Basic principle and application of plasma plasma cleaning machine surface treatment and degumming

• Categories:Company Dynamics
• Author:plasma cleaning machine-surface treatment equipment-CRF plasma machine-Sing Fung Intelligent Manufacturing
• Origin:
• Time of issue:2020-12-29
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(Summary description)1) Gel removal reaction principle: Oxygen is the main component of corrosive gases in dry rubber removal. Plasma plasma cleaning machine surface treatment of gel with high frequency and microwave energy weak electrolyte, so that oxygen ions, free oxygen molecules O, oxygen atoms and electron mixture in high frequency working voltage and lithography film reaction: O2→O*+O*, CxHy+O*→CO2↑+H2O↑, after the reaction is completed, remove CO2 and H2O.   2) Plasma plasma technology for gum removal: Take vacuum plasma cleaning machine as an example. The material to remove adhesive was placed in the vacuum system and inserted between two electrodes, and the high-voltage output power was increased under the sound chamber working pressure of 1.3-13PA. Glow charging and discharging was performed in the middle of the electrode. By adjusting the performance parameters such as output power and total flow rate, different speed of removing adhesive could be obtained.   Influence of plasma-cleaning machine surface treatment on removing glue: Frequency selection: the higher the frequency, the easier it is for oxygen ionization to produce plasma, the amplitude of electrons is less than the average category, the probability of collision between electrons and gas molecular structure is reduced, so that the weak electric solution speed is reduced. Frequency selection is usually 13.56MHz and 2.45GHz. Efficacy output: For a certain amount of gas, the output power is large, the density of active particles is large, and the degumming speed is fast. However, when the output power is increased to a certain value, the energy-consuming active ions reach saturation, and the degumming speed is not obvious when the output power is increased. The size of the power needs to be adjusted according to the actual application standard. Selection of vacuum value: the moderate increase of vacuum value can increase the average free motion of electrons and increase the kinetic energy obtained from electrostatic field, which is beneficial to the weak electrolyte. When oxygen fluidity is maintained, the higher the vacuum value, the greater the relative share of oxygen and the greater the concentration of specific particles. If the vacuum degree is too high, the concentration of the active particle will decrease. The influence of oxygen flow rate on the surface treatment of plasma plasma cleaning machine: high oxygen flow rate, high density of activated particles, fast degumming speed, but too fast, increase the probability of positive ion synthesis, reduce the average free path of electrons, reduce the compressive strength of the weak electrolyte. Assuming that the working pressure of the reflecting chamber is stable and the total flow rate rises, the gas extraction rate will also rise, and the pumping rate of the active particles not involved in the reaction will also rise, so the flow rate has no obvious effect on the degumming effect.