Plasma cleaning machine Classification

• Categories:Industry News
• Author:plasma cleaning machine-surface treatment equipment-CRF plasma machine-Sing Fung Intelligent Manufacturing
• Origin:
• Time of issue:2020-10-24
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(Summary description)According to the different ways of plasma production, the plasma cleaning machine can be classified into which kinds, the following introduction: corona plasma cleaning, glow plasma cleaning, rf plasma cleaning, dielectric barrier plasma cleaning, microwave plasma cleaning and atmospheric pressure plasma arc cleaning these types. Among them, low-pressure plasma cleaning is generally corona plasma cleaning, glow plasma cleaning and rf plasma cleaning, atmospheric plasma cleaning is generally plasma cleaning, microwave plasma cleaning and atmospheric plasma arc cleaning. Corona plasma cleaning machine: Use an electrode with a small radius of curvature and apply a high voltage to it. Due to the small curvature radius of the electrode, the electric field near the electrode area is particularly strong, which is easy to form electron emission and gas ionization, thus forming corona. This method is difficult to obtain stable corona discharge, easy to produce partial arc discharge and discharge energy is not uniform, used in flue gas desulfurization denitrification, automobile exhaust purification and other fields. Glow plasma cleaning machine: At low voltage, a certain voltage can be applied to the two flat electrodes to form a glow discharge, which is a stable self-sustaining discharge with the discharge current at milliamps. It is sustained by secondary electron emission from the cathode bombarded by positive ions. The power supply can be DC or AC. Although a typical large volume and strongly excited low-temperature plasma can be produced, its working pressure is too low to be continuously produced in industrial applications and its application cost is high. At present, it is mainly used for cleaning in semiconductor industry. Rf plasma cleaning machine: Rf discharges are usually operated at low pressure, but can also be operated at normal pressure or even under pressure, characterized by discharge gas not in contact with the electrode. Rf discharge is the use of high frequency electric field to discharge the gas in the reactor, through inductance or capacitance mutation to produce plasma. Due to the high energy and wide range of rf single electrode discharges, it has been used in surface treatment of materials and removal and cracking of toxic wastes. DBD plasma cleaning machine: Between two different discharge electrodes into work gas, with a dielectric cover one or two electrodes, or the medium can be suspended in the discharge space directly, or fill the granular medium, when applying high enough voltage between two electrodes, the gas will be breakdown and between the electrode discharge, dielectric barrier discharge is happened. Dielectric barrier discharges can operate at high pressure and over a wide frequency range. In practical applications, the flat electrode structure is widely used in the modification, grafting, surface tension improvement and hydrophilic modification of polymer and metal films and plates in industry. Microwave plasma cleaning machine: Microwave discharge is a non-electrode discharge, which avoids the influence of discharge materials on the reaction. It can operate over a wide range of frequencies and gas pressures and can produce large volumes of uniformly non-equilibrium plasma. Microwave plasmas are mainly used in material surface machining, modification and hardening treatment of tools, dies and engineering metals. APPA cleaning: Atmospheric atmospheric plasma arc cleaning is the use of high energy density plasma beam directly on the surface of the workpiece. Under the activation of high-energy particles, the layer to be cleaned will produce a series of physical and chemical reactions, such as thermal shock, activation decomposition, thermal expansion, etc., to achieve the purpose of separating pollutants from the workpiece. Different kinds of working gases can be used to deal with different surface pollutants. For example, a mixture of plasma gases can clean both organic dirt on the substrate and oxides on the surface.